Plasma generator

专利名称：Plasma generator发明人：篠原 己拔申请号：JP特願平2-98408申请日：19900413

公开号：JP特公平7-15838B2公开日：19950222

摘要：PURPOSE:To accomplish a plasma generating device to generate plasma whichhas a large bore and is as flat as practicable, by performing TEon mode excitation withmicrowave power in a metal cylinder, applying a mag. field corresponding to the excitedfrequency, and thereby generating cyclotron resonance. CONSTITUTION:One end face inaxial direction of a metal cylinder 1 is sealed with a metal plate 12, and microwave poweris supplied from a terminal 2 so as to make TEon mode excitation, and the inside of aplasma chamber 1 is put in a required intensity of magnetic field using an excitation coil 3or a permanent magnet. A gaseous substance is fed to the plasma chamber 1 from aplasma substance cast-in hole 4. Because a magnetic field of such an intensity as togenerate absorption of cyclotron resonance is applied around this cast-in hole 4, plasmais ignited, dispersed in the chamber 1 following the stream of the gas, and equalized. Asthis plasma stream is excited by the microwave power in the TEon mode, the diameterbecomes large. This allows uniform generation of plasma having a large bore.

申请人：日本高周波株式会社

地址：神奈川県横浜市緑区中山町1119

国籍：JP

代理人：菅 直人 (外1名)

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