Optical displacement sensor

专利名称：Optical displacement sensor发明人：Ib-Rune Johansen,Britta Grennberg

Fismen,Henrik Rogne,Dag Wang,BeritSundby Avset,Alain Ferber,Ralph W.Bernstein

申请号：US10497099申请日：20021002公开号：US07164479B2公开日：20070116

专利附图：

摘要：This invention relates to an optical displacement sensor element, e.g. for use in

a pressure sensor or a microphone, comprising two essentially flat surfaces beingseparated by a cavity being defined by a spacer, the distance between the surfaces beingvariable thus providing a displacement sensitive Fabry-Perot interferometer. Both of saidsurfaces are at least partially reflective, and in that said first surface is provided with atleast one optical detector, and one of surfaces being provided on an at least partiallytransparent material.

申请人：Ib-Rune Johansen,Britta Grennberg Fismen,Henrik Rogne,Dag Wang,BeritSundby Avset,Alain Ferber,Ralph W. Bernstein

地址：Oslo NO,Oslo NO,Oslo NO,Oslo NO,Oslo NO,Haslum NO,Bekkestua NO

国籍：NO,NO,NO,NO,NO,NO,NO

代理机构：Rothwell, Figg, Ernst & Manbeck, P.C.

更多信息请下载全文后查看