BLOCK COPOLYMERS FOR DIRECTED SELF-ASSEMBLY APPLIC

专利名称：BLOCK COPOLYMERS FOR DIRECTED SELF-ASSEMBLY APPLICATIONS

发明人：Noel Arellano,Joy Cheng,Teddie P.

Magbitang,Jed W. Pitera,Daniel P.

Sanders,Kristin Schmidt,Hoa D. Truong,AnkitVora

申请号：US14919070申请日：20151021

公开号：US20170114246A1公开日：20170427

专利附图：

摘要：Block copolymers (BCPs) for self-assembly applications comprise a linearfluorinated linking group L′ joining a pair of adjacent blocks. A film layer comprising aBCP, which is disposed on an underlayer and in contact with an atmosphere, is capable offorming a perpendicularly oriented domain pattern when the underlayer is preferentiallywetted by one domain of an otherwise identical self-assembled BCP in which all fluorinesof L′ are replaced by hydrogen. The BCP can be a low-chi or high-chi BCP. In a preferredembodiment, the BCP comprises a styrene-based first block, and a second blockcomprises a carbonate and/or ester repeat unit formed by ring opening polymerizationof a cyclic carbonate and/or cyclic ester monomer. The linking group L′ has a lowersurface energy than each of the polymer blocks.

申请人：International Business Machines Corporation

地址：Armonk NY US

国籍：US

更多信息请下载全文后查看