专利名称:BLOCK COPOLYMERS FOR DIRECTED SELF-ASSEMBLY APPLICATIONS
发明人:Noel Arellano,Joy Cheng,Teddie P.
Magbitang,Jed W. Pitera,Daniel P.
Sanders,Kristin Schmidt,Hoa D. Truong,AnkitVora
申请号:US14919070申请日:20151021
公开号:US20170114246A1公开日:20170427
专利附图:
摘要:Block copolymers (BCPs) for self-assembly applications comprise a linearfluorinated linking group L′ joining a pair of adjacent blocks. A film layer comprising aBCP, which is disposed on an underlayer and in contact with an atmosphere, is capable offorming a perpendicularly oriented domain pattern when the underlayer is preferentiallywetted by one domain of an otherwise identical self-assembled BCP in which all fluorinesof L′ are replaced by hydrogen. The BCP can be a low-chi or high-chi BCP. In a preferredembodiment, the BCP comprises a styrene-based first block, and a second blockcomprises a carbonate and/or ester repeat unit formed by ring opening polymerizationof a cyclic carbonate and/or cyclic ester monomer. The linking group L′ has a lowersurface energy than each of the polymer blocks.
申请人:International Business Machines Corporation
地址:Armonk NY US
国籍:US
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