Interferometer and method of calibrating the inter

专利名称：Interferometer and method of calibrating

the interferometer

发明人：Kazuhiko Kawasaki,Yoshimasa Suzuki,David

W. Sesko

申请号：US11411809申请日：20060427

公开号：US20060250618A1公开日：20061109

专利附图：

摘要：An interferometer comprises a wavelength-variable light source. A referencelight and a measurement light are synthesized, and the synthesized light is split into a

plurality of split lights. A certain phase difference is provided between the split lightsthrough phase shifting optical members. A plurality of interference fringe images formedby the phase-shifted split lights are captured at an imaging unit. Biases, amplitudes andthe amounts of phase shift of the interference fringes formed by the plurality of splitlights are calculated, based on interference fringe intensities of the imaged interferencefringes, which are obtained by disposing a calibrating substrate instead of the measuringobject varying the wavelength of the emitted light to plural values, and operating theimaging unit to capture a plurality of images of interference fringes obtained by the splitlights.

申请人：Kazuhiko Kawasaki,Yoshimasa Suzuki,David W. Sesko

地址：Ushiku-shi JP,Tsukuba-shi JP,Woodinville WA US

国籍：JP,JP,US

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