System and method for multi-dimensional optical in
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专利内容由知识产权出版社提供
专利名称：System and method for multi-dimensional
optical inspection
发明人：Dan Zemer,Michael Faibisch申请号：US10032060申请日：20011231公开号：US06654115B2公开日：20031125
专利附图：
摘要：An optical inspection system has a topology sensing assembly. A heightdetector detects whether a region of a circuit has a height different from a height of thesurface, and provides height data. A topology representation of the circuit, based on the
height data, forms the basis for a reduced representation of the topology, andsubsequent defect analysis.
申请人：ORBOTECH LTD.
代理机构：Sughrue Mion, PLLC
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