Optical tunable filter and method of manufacturing

专利名称：Optical tunable filter and method of

manufacturing the same

发明人：Ryosuke Nakamura,Shinichi Kamisuki,Akihiro

Murata,Mitsuhiro Yoda

申请号：US11002441申请日：20041202公开号：US07304800B2公开日：20071204

专利附图：

摘要：An optical tunable filter is provided including a first substrate having lighttransmission properties and having a movable part and a supporting member that

movably supports the movable part and having a smaller thickness than the movablepart, a second substrate having light transmission properties and opposed to the firstsubstrate, a first gap and a second gap provided between the movable part and thesecond substrate, an interference part causing interference between the movable partand the second substrate through the second gap and a drive member changing aninterval of the second gap by moving the movable part to the second substrate bymaking use of the first gap.

申请人：Ryosuke Nakamura,Shinichi Kamisuki,Akihiro Murata,Mitsuhiro Yoda

地址：Suwa JP,Suwa JP,Suwa JP,Suwa JP

国籍：JP,JP,JP,JP

代理机构：Harness, Dickey & Pierce, P.L.C.

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