APPARATUS AND METHOD OF FABRICATING FLAT PANEL DIS

专利名称：APPARATUS AND METHOD OF

FABRICATING FLAT PANEL DISPLAY DEVICE

发明人：Tae-Joon SONG,Dhang KWON,Hang-Sup

CHO,Seong-Pil CHO,Ho Su KIM,Doo-HeeJANG

申请号：US13087519申请日：20110415

公开号：US20110266709A1公开日：20111103

专利附图：

摘要：Disclosed are an apparatus and method for fabricating a flat panel display

device to realize easy separation of a substrate from an imprinting mold. The apparatusincludes an imprinting mold connected to a substrate to form a thin film pattern on thesubstrate, a first adsorption pad to vacuum-adsorb the center of the imprinting mold, asecond adsorption pad to vacuum-adsorb the periphery of the imprinting mold, and aconnector connected to vacuum pins to vertically move in different regions of the firstand second adsorption pads.

申请人：Tae-Joon SONG,Dhang KWON,Hang-Sup CHO,Seong-Pil CHO,Ho Su KIM,Doo-Hee JANG

地址：Gyeonggi-do KR,Gyeonggi-do KR,Gyeonggi-do KR,Geyonggi-do KR,Gyeonggi-doKR,Gyeonggi-do KR

国籍：KR,KR,KR,KR,KR,KR

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